Plenary Session
Sunday, March 18, 2012
8:45 – 12:00
Sunday, March 18, 2012
Parallel Symposium Oral Sessions: 13:30 – 17:00
Conference Poster Session: 17:00 – 18:30
Conference Banquet: 19:00 – 21:00
Monday, March 19, 2012
Parallel Symposium Oral Sessions: 08:45 – 17:30
Symposium I: Design and Device Engineering
Symposium II: Lithography and Patterning
Symposium III: Dry &Wet Etch and Cleaning
Symposium IV: Thin Film Technology
Symposium V: CMP and Post-CMP Cleaning
Symposium VI: Materials and Process Integration for Device and Interconnection
Symposium VII: Packaging and Assembly
Symposium VIII: Metrology, Reliability and Testing