SEMICON China - 同期研讨会/活动 - CSTIC 2012

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Plenary Session

Sunday, March 18, 2012
8:45 – 12:00


Dr. Leo Esaki	Dr. Kinam Kim	Dr. Luc Van den hove
Nobel Laureate, IBM Fellow, Chairman of the Science and Technology Promotion Foundation of Ibaraki, Japan	Samsung Fellow, President and CEO of Samsung Institute of Advanced Technology, Korea	CEO of IMEC, Belgium

Sunday, March 18, 2012
Parallel Symposium Oral Sessions: 13:30 – 17:00
Conference Poster Session: 17:00 – 18:30
Conference Banquet: 19:00 – 21:00

Monday, March 19, 2012
Parallel Symposium Oral Sessions: 08:45 – 17:30

Symposium I: Design and Device Engineering

Symposium II: Lithography and Patterning

Symposium III: Dry &Wet Etch and Cleaning

Symposium IV: Thin Film Technology

Symposium V: CMP and Post-CMP Cleaning

Symposium VI: Materials and Process Integration for Device and Interconnection

Symposium VII: Packaging and Assembly

Symposium VIII: Metrology, Reliability and Testing

Symposium IX: Emerging Semiconductor Technologies

Symposium X: Advances in MEMS and Sensor Technologies